Micro-optical elements with arbitrary surfaces
نویسندگان
چکیده
We present a comparison of three different technologies for the fabrication of microoptical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography in combination with reactive ion etching, and graytone lithography.
منابع مشابه
DGaO Proceeding
Hybrid optical elements that combine refractive and diffractive functionality are versatile components for all kinds of applications in imaging or metrology. In the past those elements were composed of a flat diffractive and a curved refractive surface. Fusing both functions in a single surface will enhance the capabilities of these optical components further. The fabrication of such precision ...
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